Capacitively coupled radio-frequency discharges in nitrogen at low pressures

This paper uses experiments and modelling to study capacitively coupled radio-frequency (rf) discharges in pure nitrogen, at 13.56MHz frequency, 0.1–1 mbar pressures and 2–30W coupled powers. Experiments performed on two similar (not twin) setups, existing in the LATMOS and the GREMI laboratories, i...

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Detalhes bibliográficos
Autor principal: Alves, L. L. (author)
Outros Autores: Marques, L. (author), Pintassilgo, C. D. (author), Wattieaux, G. (author), Es-Sebbar, E. T. (author), Berndt, J. (author), Kovacevic, E. (author), Carrasco, N. (author), Boufendi, L. (author), Cernogora, G. (author)
Formato: article
Idioma:eng
Publicado em: 2012
Assuntos:
Plasma
Radio-frequency
Nitrogen
Science & Technology
Texto completo:http://hdl.handle.net/1822/21278
País:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/21278

Texto Completo

http://hdl.handle.net/1822/21278

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