Capacitively coupled radio-frequency discharges in nitrogen at low pressures

This paper uses experiments and modelling to study capacitively coupled radio-frequency (rf) discharges in pure nitrogen, at 13.56MHz frequency, 0.1–1 mbar pressures and 2–30W coupled powers. Experiments performed on two similar (not twin) setups, existing in the LATMOS and the GREMI laboratories, i...

Full description

Bibliographic Details
Main Author: Alves, L. L. (author)
Other Authors: Marques, L. (author), Pintassilgo, C. D. (author), Wattieaux, G. (author), Es-Sebbar, E. T. (author), Berndt, J. (author), Kovacevic, E. (author), Carrasco, N. (author), Boufendi, L. (author), Cernogora, G. (author)
Format: article
Language:eng
Published: 2012
Subjects:
Plasma
Radio-frequency
Nitrogen
Science & Technology
Online Access:http://hdl.handle.net/1822/21278
Country:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/21278

Internet

http://hdl.handle.net/1822/21278

Similar Items