Electrical, optical and photoconductive properties of Sn-doped indium sulfofluoride thin films
This work reports on undoped and Sn-doped indium sulfofluoride thin-films deposited by radio-frequency plasma-enhanced reactive thermal evaporation. The deposition was performed evaporating pure indium or indium-tin alloy in SF6 plasma at substrate temperatures ranging from 373 to 423 K. Rutherford...
Main Author: | |
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Other Authors: | , , , , , , , |
Format: | article |
Language: | eng |
Published: |
2021
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Subjects: | |
Online Access: | http://hdl.handle.net/10400.21/12547 |
Country: | Portugal |
Oai: | oai:repositorio.ipl.pt:10400.21/12547 |