Electrical, optical and photoconductive properties of Sn-doped indium sulfofluoride thin films

This work reports on undoped and Sn-doped indium sulfofluoride thin-films deposited by radio-frequency plasma-enhanced reactive thermal evaporation. The deposition was performed evaporating pure indium or indium-tin alloy in SF6 plasma at substrate temperatures ranging from 373 to 423 K. Rutherford...

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Bibliographic Details
Main Author: Vygranenko, Yuri (author)
Other Authors: Fernandes, M. (author), Vieira, Manuela (author), Lavareda, G. (author), Carvalho, C. Nunes De (author), Brogueira, P. (author), Amaral, A. (author), Barradas, N. P. (author), Alves, E. (author)
Format: article
Language:eng
Published: 2021
Subjects:
Online Access:http://hdl.handle.net/10400.21/12547
Country:Portugal
Oai:oai:repositorio.ipl.pt:10400.21/12547