Elastic properties of (Ti,Al,Si)N nanocomposite films
(Ti,Al,Si)N films have been prepared by d.c. and rf reactive magnetron sputtering, with Si contents in the range 2-11 at.% and Al contents between 4 and 19 at.%. Samples prepared in rotation mode (three magnetrons) presented densities between 4.0 and 4.6 g/cm3, while samples prepared in static mode...
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| Other Authors: | , , , , |
| Format: | article |
| Language: | eng |
| Published: |
2001
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| Subjects: | |
| Online Access: | http://hdl.handle.net/10316/4292 |
| Country: | Portugal |
| Oai: | oai:estudogeral.sib.uc.pt:10316/4292 |