Low f-number microlenses for integration on optical microsystems
This paper presents microlenses (MLs) with low f-number made of AZ4562 photoresist for integration on optical microsystems. The fabrication process was based on the thermal reflow and rehydration. Large series of MLs were fabricated with a width of 35 μm, a thickness of 5 μm, and spaced apart by 3 μ...
| Autor principal: | |
|---|---|
| Outros Autores: | , , |
| Formato: | article |
| Idioma: | eng |
| Publicado em: |
2015
|
| Assuntos: | |
| Texto completo: | http://hdl.handle.net/1822/39802 |
| País: | Portugal |
| Oai: | oai:repositorium.sdum.uminho.pt:1822/39802 |