Low f-number microlenses for integration on optical microsystems

This paper presents microlenses (MLs) with low f-number made of AZ4562 photoresist for integration on optical microsystems. The fabrication process was based on the thermal reflow and rehydration. Large series of MLs were fabricated with a width of 35 μm, a thickness of 5 μm, and spaced apart by 3 μ...

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Bibliographic Details
Main Author: Rocha, Rui Pedro (author)
Other Authors: Belsley, M. (author), Correia, J. H. (author), Carmo, João Paulo Pereira (author)
Format: article
Language:eng
Published: 2015
Subjects:
OPTO
Micro-optics
Microlenses
Optical device fabrication
F-number
Focal length characterization
Ciências Naturais::Ciências Físicas
Science & Technology
Online Access:http://hdl.handle.net/1822/39802
Country:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/39802

Internet

http://hdl.handle.net/1822/39802

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