Systematic characterization of low-pressure capacitively coupled hydrogen discharges
The paper presents a systematic characterization of pure hydrogen capacitively coupled discharges, produced in a parallel plate cylindrical setup. A two-dimensional, time-dependent fluid model is used to describe the production, transport, and destruction of electrons and positive ions H+,H2+, and H...
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| Other Authors: | , , , |
| Format: | article |
| Language: | eng |
| Published: |
2004
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| Subjects: | |
| Online Access: | http://hdl.handle.net/1822/3857 |
| Country: | Portugal |
| Oai: | oai:repositorium.sdum.uminho.pt:1822/3857 |