Effects of O addition on the thermal behaviour of hard W-N sputtered coatings

The structural thermal behaviour of three W-O-N sputtered coatings with similar metalloid to metal ratio (~2.1) was investigated up to 900 °C after annealing in a vacuum tube furnace as well as in-situ HT-XRD under a controlled atmosphere of Ar-5%H2. The as-deposited microstructure of the coatings c...

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Bibliographic Details
Main Author: Louro, C. (author)
Other Authors: Oliveira, J. C. (author), Cavaleiro, A. (author)
Format: article
Language:eng
Published: 2009
Subjects:
Tungsten oxynitride
Sputtering
Thermal behaviour
HT-XRD
Hardness
Online Access:http://hdl.handle.net/10316/12888
Country:Portugal
Oai:oai:estudogeral.sib.uc.pt:10316/12888

Internet

http://hdl.handle.net/10316/12888

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