ZnO thin films implanted with Al, Sb and P: optical, structural and electrical characterization
In this work we report a study on the structure, optical and electrical properties of P, Sb and Al implanted ZnO thin films that had been produced by r.f. magnetron sputtering. The influence of the different replacing atoms on the structure and properties of the films has been explored. Looking for...
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| Other Authors: | , , , , |
| Format: | article |
| Language: | eng |
| Published: |
2009
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| Subjects: | |
| Online Access: | https://hdl.handle.net/1822/13749 |
| Country: | Portugal |
| Oai: | oai:repositorium.sdum.uminho.pt:1822/13749 |