Property change in multifunctional TiCxOy thin films: Effect of the O/Ti ratio

TiCxOy films with various O/Ti ratios have been deposited by DC magnetron sputtering, using C pieces incrusted in a Ti target erosion area. Composition analysis revealed the existence of three different growth regimes: (i) zone I, corresponding to films with metallic-like appearance, and atomic rati...

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Bibliographic Details
Main Author: Fernandes, A. C. (author)
Other Authors: Carvalho, P. (author), Vaz, F. (author), Lanceros-Méndez, S. (author), Machado, A. V. (author), Parreira, N. M. G. (author), Pierson, J. F. (author), Martin, N. (author)
Format: article
Language:eng
Published: 2006
Subjects:
Titanium oxycarbide
Sputtering
Structure
Resistivity
Online Access:http://hdl.handle.net/10316/4217
Country:Portugal
Oai:oai:estudogeral.sib.uc.pt:10316/4217

Internet

http://hdl.handle.net/10316/4217

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