RF capacitively coupled plasmas in N2-H2 mixtures

Comunicação em Poster

Bibliographic Details
Main Author: Mahjoub, A. (author)
Other Authors: Gouveia, A. (author), Carrasco, N. (author), Pintassilgo, C. D. (author), Marques, L. (author), Ramos, Marta M. D. (author), Alves, L. L. (author), Cernogora, G. (author)
Format: conferenceObject
Language:eng
Published: 2012
Online Access:http://hdl.handle.net/1822/20138
Country:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/20138

Internet

http://hdl.handle.net/1822/20138

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