Influence of mechanical stress in a packaged frequency-modulated MEMS accelerometer

Frequency modulated accelerometers composed of two double-ended tuning fork (DETF) resonators on a differential configuration were characterized for their sensitivity to force applied to their package. Commonly, differential architectures are employed to cancel common mode errors, such as the mechan...

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Detalhes bibliográficos
Autor principal: Moreira, Eurico Esteves (author)
Outros Autores: Kuhlmann, Burkhard (author), Alves, Filipe Manuel Serra (author), Dias, Rosana Maria Alves (author), Cabral, Jorge (author), Gaspar, Joao (author), Rocha, Luís Alexandre Machado (author)
Formato: conferencePaper
Idioma:eng
Publicado em: 2020
Assuntos:
MEMS accelerometer
double-ended tuning fork resonators
mechanical stress
Science & Technology
Texto completo:http://hdl.handle.net/1822/71128
País:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/71128

Texto Completo

http://hdl.handle.net/1822/71128

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