Influence of mechanical stress in a packaged frequency-modulated MEMS accelerometer

Frequency modulated accelerometers composed of two double-ended tuning fork (DETF) resonators on a differential configuration were characterized for their sensitivity to force applied to their package. Commonly, differential architectures are employed to cancel common mode errors, such as the mechan...

ver descrição completa

Detalhes bibliográficos
Autor principal: Moreira, Eurico Esteves (author)
Outros Autores: Kuhlmann, Burkhard (author), Alves, Filipe Manuel Serra (author), Dias, Rosana Maria Alves (author), Cabral, Jorge (author), Gaspar, Joao (author), Rocha, Luís Alexandre Machado (author)
Formato: conferencePaper
Idioma:eng
Publicado em: 2020
Assuntos:
MEMS accelerometer
double-ended tuning fork resonators
mechanical stress
Science & Technology
Texto completo:http://hdl.handle.net/1822/71128
País:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/71128

Texto Completo

http://hdl.handle.net/1822/71128

Registos relacionados