Design of a polymer 3D-thermal accelerometer

A completely new approach for the fabrication of 3-axis thermal accelerometers is presented in this paper. Microinjected polystyrene micro-parts are assembled with active polyimide membranes enabling the construction of an innovative polymer based thermal accelerometer. The use of polymers (polystyr...

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Bibliographic Details
Main Author: Silva, C. S. (author)
Other Authors: Cerqueira, M. F. (author), Ribeiro, J. F. (author), Gonçalves, L. M. (author), Pontes, A. J. (author), Viana, J. C. (author), Rocha, Luís A. (author)
Format: conferenceObject
Language:eng
Published: 2011
Subjects:
Polymer microtechnologies
3-axis accelerometer
Thermal accelerometer
Online Access:http://hdl.handle.net/1822/14720
Country:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/14720

Internet

http://hdl.handle.net/1822/14720

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