A fully integrated three-axis thermal accelerometer
A combined fabrication process using polymer and silicon planar microtechnologies is presented here and used for the fabrication of a fully-integrated three-axis thermal accelerometer. The use of polymers (polystyrene and polyimide) with low thermal conductivities improves the overall power consumpt...
| Autor principal: | |
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| Outros Autores: | , , , |
| Formato: | conferencePaper |
| Idioma: | eng |
| Publicado em: |
2013
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| Assuntos: | |
| Texto completo: | http://hdl.handle.net/1822/26771 |
| País: | Portugal |
| Oai: | oai:repositorium.sdum.uminho.pt:1822/26771 |