A fully integrated three-axis thermal accelerometer

A combined fabrication process using polymer and silicon planar microtechnologies is presented here and used for the fabrication of a fully-integrated three-axis thermal accelerometer. The use of polymers (polystyrene and polyimide) with low thermal conductivities improves the overall power consumpt...

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Bibliographic Details
Main Author: Silva, C. S. (author)
Other Authors: Pontes, A. J. (author), Viana, J. C. (author), Rocha, Luís A. (author), Gaspar, J. (author)
Format: conferencePaper
Language:eng
Published: 2013
Subjects:
Thermal accelerometers
Microinjection
Three-axis accelerometers
Science & Technology
Online Access:http://hdl.handle.net/1822/26771
Country:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/26771

Internet

http://hdl.handle.net/1822/26771

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