Automated rf-PERTE system for room temperature deposition of TCO coatings

In this work we present a fully automated plasma-enhanced reactive thermal evaporation system (rf-PERTE) that can be used for the deposition of transparent metal oxide films without intentional heating of the substrate. The system and developed software enables the full control over critical deposit...

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Bibliographic Details
Main Author: Fernandes, M. (author)
Other Authors: Vygranenko, Y. (author), Vieira, M. (author), Lavareda, G. (author), Carvalho, C. Nunes de (author), Amaral, A. (author)
Format: article
Language:eng
Published: 2017
Subjects:
thin solid films
transparent conducting oxides
deposition technique
Online Access:http://hdl.handle.net/10400.21/7043
Country:Portugal
Oai:oai:repositorio.ipl.pt:10400.21/7043

Internet

http://hdl.handle.net/10400.21/7043

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