Automated rf-PERTE system for room temperature deposition of TCO coatings
In this work we present a fully automated plasma-enhanced reactive thermal evaporation system (rf-PERTE) that can be used for the deposition of transparent metal oxide films without intentional heating of the substrate. The system and developed software enables the full control over critical deposit...
| Autor principal: | |
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| Outros Autores: | , , , , |
| Formato: | article |
| Idioma: | eng |
| Publicado em: |
2017
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| Assuntos: | |
| Texto completo: | http://hdl.handle.net/10400.21/7043 |
| País: | Portugal |
| Oai: | oai:repositorio.ipl.pt:10400.21/7043 |