Capacitively coupled radio-frequency N2 discharges at low pressures
Capacitively coupled radio-frequency discharges (ccrf) in nitrogen mixtures are frequently used for the processing, modification and functionalization of different kinds of materials. Although nitrogen plasmas have been studied for many years, and despite their growing interest in applications, ther...
| Main Author: | |
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| Other Authors: | , , , , |
| Format: | conferenceObject |
| Language: | eng |
| Published: |
2013
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| Online Access: | http://hdl.handle.net/1822/26866 |
| Country: | Portugal |
| Oai: | oai:repositorium.sdum.uminho.pt:1822/26866 |