Residual stress measurement in PVD optical coatings by microtopography

Residual stress in optical plasma vapor deposited coatings must be carefully measured. The topographic inspection of the coatings’ surface at microlevel allows the assessment of its residual stress. In the present work we will report on the optical non-destructive and non-invasive microtopographic i...

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Bibliographic Details
Main Author: Costa, Manuel F. M. (author)
Other Authors: Teixeira, Vasco M. P. (author)
Format: article
Language:eng
Published: 2011
Subjects:
Online Access:http://hdl.handle.net/1822/11945
Country:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/11945