Residual stress measurement in PVD optical coatings by microtopography
Residual stress in optical plasma vapor deposited coatings must be carefully measured. The topographic inspection of the coatings’ surface at microlevel allows the assessment of its residual stress. In the present work we will report on the optical non-destructive and non-invasive microtopographic i...
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Formato: | article |
Idioma: | eng |
Publicado em: |
2011
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Texto completo: | http://hdl.handle.net/1822/11945 |
País: | Portugal |
Oai: | oai:repositorium.sdum.uminho.pt:1822/11945 |