Residual stress measurement in PVD optical coatings by microtopography

Residual stress in optical plasma vapor deposited coatings must be carefully measured. The topographic inspection of the coatings’ surface at microlevel allows the assessment of its residual stress. In the present work we will report on the optical non-destructive and non-invasive microtopographic i...

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Detalhes bibliográficos
Autor principal: Costa, Manuel F. M. (author)
Outros Autores: Teixeira, Vasco M. P. (author)
Formato: article
Idioma:eng
Publicado em: 2011
Assuntos:
Texto completo:http://hdl.handle.net/1822/11945
País:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/11945