A Pull-in Based Test Mechanism for Device Diagnostic and Process Characterization
A test technique for capacitive MEMS accelerometers and electrostatic microactuators, based on the measurement of pull-involtages and resonance frequency, is described. Using this combination of measurements, one can estimate process-inducedvariations in the device layout dimensions as well as devia...
| Autor principal: | |
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| Outros Autores: | , , , |
| Formato: | article |
| Idioma: | eng |
| Publicado em: |
2008
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| Assuntos: | |
| Texto completo: | https://repositorio-aberto.up.pt/handle/10216/57143 |
| País: | Portugal |
| Oai: | oai:repositorio-aberto.up.pt:10216/57143 |