Micro-g MEMS accelerometer based on time measurement

Programa Doutoral em Engenharia Electrónica e de Computadores

Bibliographic Details
Main Author: Dias, Rosana Maria Alves (author)
Format: doctoralThesis
Language:eng
Published: 2013
Subjects:
Pull-in
MEMS
accelerometer
noise
parallel-plates
damping
electrostatic feedback
gas viscosity
acelerómetro
placas-paralelas
amortecimento
feeback electrostático
viscosidade de gas
Online Access:http://hdl.handle.net/1822/24893
Country:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/24893

Internet

http://hdl.handle.net/1822/24893

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