Embedded MEMS Platform for structure test and characterization

"Procedia Engineering, vol. 120 (2015)"

Bibliographic Details
Main Author: Brito, N. (author)
Other Authors: Alves, F. S. (author), Cabral, Jorge (author), Gaspar, J. (author), Monteiro, João L. (author), Rocha, Luís Alexandre Machado (author)
Format: conferencePaper
Language:eng
Published: 2015
Subjects:
MEMS characterization
Pull-in voltage
Dedicated embedded system
Science & Technology
Online Access:http://hdl.handle.net/1822/50686
Country:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/50686

Internet

http://hdl.handle.net/1822/50686

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