Auto-calibrated capacitive MEMS accelerometer
An electronic calibration technique for capacitive MEMS accelerometers based on the measurement of pull-in voltages is described. A combination of pull-in voltages and resonance frequency measurements can be used for the estimation of processinduced variations in device dimensions from layout and de...
| Autor principal: | |
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| Outros Autores: | , , , |
| Formato: | book |
| Idioma: | eng |
| Publicado em: |
2008
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| Assuntos: | |
| Texto completo: | https://hdl.handle.net/10216/71536 |
| País: | Portugal |
| Oai: | oai:repositorio-aberto.up.pt:10216/71536 |