APA (7th ed.) Citation

Alpuim, P., Chu, V., & Conde, J. P. (2001). Doping of amorphous and microcrystalline silicon films deposited at low substrate temperatures by hot-wire chemical vapor deposition.

Chicago Style (17th ed.) Citation

Alpuim, P., V. Chu, and J. P. Conde. Doping of Amorphous and Microcrystalline Silicon Films Deposited at Low Substrate Temperatures by Hot-wire Chemical Vapor Deposition. 2001.

MLA (8th ed.) Citation

Alpuim, P., et al. Doping of Amorphous and Microcrystalline Silicon Films Deposited at Low Substrate Temperatures by Hot-wire Chemical Vapor Deposition. 2001.

Warning: These citations may not always be 100% accurate.