Characterization of a single electrode focusing lens for ion beam deceleration

An ion beam deceleration system was studied for the highcurrent ion implanter at the Laboratório de Aceleradores e Tecnologias de Radiação at the Campus Tecnológico e Nuclear, of Instituto Superior Técnico. The installed system consists of a target plate and one electrostatic focusing lens with one...

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Bibliographic Details
Main Author: Lopes, Jose (author)
Other Authors: Rocha, J. (author), Catarino, Norberto (author), Redondo, Luis (author)
Format: article
Language:eng
Published: 2017
Subjects:
Deceleration
electrostatic Einzel lens
fluence
ion implantation
Online Access:http://hdl.handle.net/10400.21/7028
Country:Portugal
Oai:oai:repositorio.ipl.pt:10400.21/7028

Internet

http://hdl.handle.net/10400.21/7028

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