Influence of stoichiometry and structure on the optical properties of AlNxOy films
The AlNxOy system offers the possibility to obtain a wide range of responses, by tailoring the properties between Al, AlN and Al2O3, opening a significant number of possible applications. The aim of this work is to correlate the optical properties of AlNxOy thin films with their composition and stru...
Autor principal: | |
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Outros Autores: | , , , , , |
Formato: | article |
Idioma: | eng |
Publicado em: |
2013
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Assuntos: | |
Texto completo: | http://hdl.handle.net/1822/21066 |
País: | Portugal |
Oai: | oai:repositorium.sdum.uminho.pt:1822/21066 |