Influence of stoichiometry and structure on the optical properties of AlNxOy films

The AlNxOy system offers the possibility to obtain a wide range of responses, by tailoring the properties between Al, AlN and Al2O3, opening a significant number of possible applications. The aim of this work is to correlate the optical properties of AlNxOy thin films with their composition and stru...

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Bibliographic Details
Main Author: Borges, Joel Nuno Pinto (author)
Other Authors: Barradas, N. P. (author), Alves, Eduardo (author), Beaufort, Marie France (author), Eyidi, Dominique (author), Vaz, F. (author), Marques, L. (author)
Format: article
Language:eng
Published: 2013
Subjects:
AlNxOy
Magnetron sputtering
Stoichiometry
Structure
Optical properties
Science & Technology
Online Access:http://hdl.handle.net/1822/21066
Country:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/21066

Internet

http://hdl.handle.net/1822/21066

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