Optimization of Au:CuO thin films by plasma surface modification for high-resolution LSPR gas sensing at room temperature

In this study, thin films composed of gold nanoparticles embedded in a copper oxide matrix (Au:CuO), manifesting Localized Surface Plasmon Resonance (LSPR) behavior, were produced by reactive DC magnetron sputtering and post-deposition in-air annealing. The effect of low-power Ar plasma etching on t...

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Bibliographic Details
Main Author: Proença, Manuela (author)
Other Authors: Rodrigues, Marco S. (author), Meira, Diana I. (author), Castro, M. Cidalia R. (author), Rodrigues, Pedro V. (author), Machado, A. V. (author), Alves, Eduardo (author), Barradas, Nuno P. (author), Borges, Joel (author), Vaz, F. (author)
Format: article
Language:eng
Published: 2022
Subjects:
Online Access:https://hdl.handle.net/1822/79909
Country:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/79909