Optimization of Au:CuO thin films by plasma surface modification for high-resolution LSPR gas sensing at room temperature
In this study, thin films composed of gold nanoparticles embedded in a copper oxide matrix (Au:CuO), manifesting Localized Surface Plasmon Resonance (LSPR) behavior, were produced by reactive DC magnetron sputtering and post-deposition in-air annealing. The effect of low-power Ar plasma etching on t...
Main Author: | |
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Other Authors: | , , , , , , , , |
Format: | article |
Language: | eng |
Published: |
2022
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Subjects: | |
Online Access: | https://hdl.handle.net/1822/79909 |
Country: | Portugal |
Oai: | oai:repositorium.sdum.uminho.pt:1822/79909 |