Capacitive MEMS accelerometers testing mechanism for auto-calibration and long-term diagnostics
A test technique for capacitive MEMSaccelerometers and electrostatic micro-actuators based onthe measurement of pull-in voltages is described. Acombination of pull-in voltages and resonance frequencymeasurements can be used for the estimation of processinducedvariations in device dimensions from lay...
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| Other Authors: | , , , |
| Format: | book |
| Language: | eng |
| Published: |
2007
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| Subjects: | |
| Online Access: | https://repositorio-aberto.up.pt/handle/10216/71515 |
| Country: | Portugal |
| Oai: | oai:repositorio-aberto.up.pt:10216/71515 |
| Summary: | A test technique for capacitive MEMSaccelerometers and electrostatic micro-actuators based onthe measurement of pull-in voltages is described. Acombination of pull-in voltages and resonance frequencymeasurements can be used for the estimation of processinducedvariations in device dimensions from layout anddeviations in material properties from nominal value,which enables auto-calibration. Preliminary measurementson fabricated devices confirm the validity of the proposedtechnique. Moreover, long-term pull-in measurements haveindicated the suitability of the approach as in-systemdiagnostic tool. |
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