Capacitive MEMS accelerometers testing mechanism for auto-calibration and long-term diagnostics
A test technique for capacitive MEMSaccelerometers and electrostatic micro-actuators based onthe measurement of pull-in voltages is described. Acombination of pull-in voltages and resonance frequencymeasurements can be used for the estimation of processinducedvariations in device dimensions from lay...
| Autor principal: | |
|---|---|
| Outros Autores: | , , , |
| Formato: | book |
| Idioma: | eng |
| Publicado em: |
2007
|
| Assuntos: | |
| Texto completo: | https://repositorio-aberto.up.pt/handle/10216/71515 |
| País: | Portugal |
| Oai: | oai:repositorio-aberto.up.pt:10216/71515 |