Structural study of the oxidation process and stability of NbOxNy coatings
In the present work, we study the oxidation behaviour of NbON multilayer films. The films were deposited by DC magnetron sputtering with a reactive gas pulsing process. The nitrogen flow was kept constant and the oxygen flow was pulsed. Pulse durations of 10 s produced multilayered coatings with a p...
| Autor principal: | |
|---|---|
| Outros Autores: | , , , , , , |
| Formato: | article |
| Idioma: | eng |
| Publicado em: |
2008
|
| Assuntos: | |
| Texto completo: | http://hdl.handle.net/1822/17936 |
| País: | Portugal |
| Oai: | oai:repositorium.sdum.uminho.pt:1822/17936 |