Structural study of the oxidation process and stability of NbOxNy coatings

In the present work, we study the oxidation behaviour of NbON multilayer films. The films were deposited by DC magnetron sputtering with a reactive gas pulsing process. The nitrogen flow was kept constant and the oxygen flow was pulsed. Pulse durations of 10 s produced multilayered coatings with a p...

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Bibliographic Details
Main Author: Chappé, J. M. (author)
Other Authors: Carvalho, P. (author), Machado, A. V. (author), Vaz, F. (author), Alves, E. (author), Barradas, N. P. (author), Fenker, M. (author), Kappl, H. (author)
Format: article
Language:eng
Published: 2008
Subjects:
NbO(x)N(y) coatings
Reactive sputtering
Oxidation
Thermal stability
NbO N coatings x y
Science & Technology
Online Access:http://hdl.handle.net/1822/17936
Country:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/17936

Internet

http://hdl.handle.net/1822/17936

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