Outlier detection in lithography: benchmarking and the creation of a new algorithm

Internship Report presented as the partial requirement for obtaining a Master's degree in Data Science and Advanced Analytics

Bibliographic Details
Main Author: Brown, Monika Rose (author)
Format: masterThesis
Language:eng
Published: 2020
Subjects:
Online Access:http://hdl.handle.net/10362/100950
Country:Portugal
Oai:oai:run.unl.pt:10362/100950