MPCVD diamond tool cutting-edge coverage: dependence on the side wedge angle
Microwave plasma CVD usually produces uniform diamond coatings and high-quality diamond films. However, abnormal deposits appear near the sample edges - the so-called ‘edge effect’. Wedge-shaped silicon nitride inserts with 30º-, 60º-, 75º- and 90º- edge angles were vertically and horizontally expos...
Autor principal: | |
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Outros Autores: | , , , , |
Formato: | article |
Idioma: | eng |
Publicado em: |
2001
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Assuntos: | |
Texto completo: | http://hdl.handle.net/1822/227 |
País: | Portugal |
Oai: | oai:repositorium.sdum.uminho.pt:1822/227 |