Corrosion behaviour of substoichiometric TiNx films produced by DC magnetron sputtering

The present work describes the corrosion behaviour of substoichiometric TiNx films obtained by dc reactive magnetron sputtering. The coatings thickness ranged from 1.7 to 4.2 µm and the nitrogen content varied between 0 and 55 at. %. According to structural characterization by XRD, the films reveale...

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Bibliographic Details
Main Author: Ariza, E. (author)
Other Authors: Rocha, L. A. (author), Vaz, F. (author), Rebouta, L. (author), Ferreira, J. A. (author), Alves, E. (author), Goudeau, Ph. (author), Rivière, J. P. (author)
Format: conferencePaper
Language:eng
Published: 2003
Subjects:
TiN coatings
Reactive magnetron sputtering
Corrosion resistance
EIS
Online Access:http://hdl.handle.net/1822/2705
Country:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/2705

Internet

http://hdl.handle.net/1822/2705

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