Corrosion behaviour of substoichiometric TiNx films produced by DC magnetron sputtering

The present work describes the corrosion behaviour of substoichiometric TiNx films obtained by dc reactive magnetron sputtering. The coatings thickness ranged from 1.7 to 4.2 µm and the nitrogen content varied between 0 and 55 at. %. According to structural characterization by XRD, the films reveale...

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Detalhes bibliográficos
Autor principal: Ariza, E. (author)
Outros Autores: Rocha, L. A. (author), Vaz, F. (author), Rebouta, L. (author), Ferreira, J. A. (author), Alves, E. (author), Goudeau, Ph. (author), Rivière, J. P. (author)
Formato: conferencePaper
Idioma:eng
Publicado em: 2003
Assuntos:
TiN coatings
Reactive magnetron sputtering
Corrosion resistance
EIS
Texto completo:http://hdl.handle.net/1822/2705
País:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/2705

Texto Completo

http://hdl.handle.net/1822/2705

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