A chemically stable PVD multilayer encapsulation for lithium microbatteries

A multilayer physical vapour DEPOSITION (PVD) thin-film encapsulation method for lithium microbatteries is presented. Lithium microbatteries with a lithium cobalt oxide (LiCoO2) cathode, a lithium phosphorous oxynitride (LiPON) electrolyte and a metallic lithium anode are under development, using PV...

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Bibliographic Details
Main Author: Ribeiro, J. F. (author)
Other Authors: Sousa, R. (author), Cunha, D. J. (author), Vieira, E. M. F. (author), Silva, Maria Manuela (author), Dupont, L. (author), Goncalves, L. M. (author)
Format: article
Language:eng
Published: 2015
Subjects:
Microbatteries
Lithium
Encapsulation
PVD
Multilayer
Science & Technology
Online Access:http://hdl.handle.net/1822/37380
Country:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/37380

Internet

http://hdl.handle.net/1822/37380

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