Indium tin oxide thin films prepared by ion beam assisted deposition technique at different ion beam currents

Indium tin oxide (ITO) films have been deposited onto glass substrates at room temperature by ion beam assisted deposition technique (IBAD) at different ion beam currents (80 mA – 120 mA). The effect of the ion beam current on films properties has been studied. The films prepared at low ion beam cur...

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Bibliographic Details
Main Author: Meng Lijian (author)
Other Authors: Gao Jinsong (author), Teixeira, Vasco M. P. (author), Santos, M. P. dos (author)
Format: article
Language:eng
Published: 2008
Subjects:
Science & Technology
Online Access:http://hdl.handle.net/1822/13695
Country:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/13695

Internet

http://hdl.handle.net/1822/13695

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