High resolution pull-in inclinometer
A MEMS high-resolution inclinometer is presented in this paper. Unlike traditional approaches, a transduction mechanism based on the measurement of pull-in voltages is used for the realization of the sensor. The advantage is on-device capability for auto-calibration and thermal compensation, and mor...
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| Other Authors: | , , , |
| Format: | conferencePaper |
| Language: | eng |
| Published: |
2013
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| Subjects: | |
| Online Access: | http://hdl.handle.net/1822/26862 |
| Country: | Portugal |
| Oai: | oai:repositorium.sdum.uminho.pt:1822/26862 |
| Summary: | A MEMS high-resolution inclinometer is presented in this paper. Unlike traditional approaches, a transduction mechanism based on the measurement of pull-in voltages is used for the realization of the sensor. The advantage is on-device capability for auto-calibration and thermal compensation, and more relaxed specifications for the capacitive readout electronics. In addition, dedicated MEMS microstructures with extra proof-mass are proposed and tested for high-resolution applications. The microstructures have differential actuation electrodes (with a common electrode) resulting in two pull-in voltages that change differentially with applied acceleration. The device shows a sensitivity of 300 mV/º with a non-linearity below 0.5%FS (Full Scale of ±10º). The measured noise level of 3mV sets the system resolution at 0.01º, above the theoretical resolution limit of 0.001º (due to the actuation voltage resolution of 300μV). |
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