Thermal stability of reactive sputtered tungsten oxide coatings
The thermal stability of different W-O coatings, W100, W90O10, W54O46, W30O70 and W25O75, were studied by in-situ X-ray diffraction at elevated temperatures up to 900 °C. The coatings were deposited by DC reactive magnetron sputtering from a pure tungsten target in an Ar + O2 atmosphere onto Fecrall...
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Other Authors: | , |
Format: | article |
Language: | eng |
Published: |
2007
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Subjects: | |
Online Access: | http://hdl.handle.net/10316/4205 |
Country: | Portugal |
Oai: | oai:estudogeral.sib.uc.pt:10316/4205 |