Nanostructured Ti1-xCux thin films with tailored electrical and morphological anisotropy
Inclined, zigzag and spiral Ti1-xCux films were co-sputtered by the Glancing Angle Deposition technique. Two distinct titanium (Ti) and copper (Cu) targets were used and the films were grown with a particle flow incidence angle α of 80°. The thin films had Cu contents ranging from 36 to 76 ± 5 at. %...
Main Author: | |
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Other Authors: | , , , , , |
Format: | article |
Language: | eng |
Published: |
2019
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Subjects: | |
Online Access: | https://hdl.handle.net/1822/60717 |
Country: | Portugal |
Oai: | oai:repositorium.sdum.uminho.pt:1822/60717 |