AlNxOy thin films for electrical applications

Comunicação oral

Bibliographic Details
Main Author: Borges, Joel Nuno Pinto (author)
Other Authors: Arvinte, R. (author), Sousa, R. E. (author), Vaz, F. (author), Marques, L. (author)
Format: conferenceObject
Language:eng
Published: 2011
Subjects:
Aluminium oxynitride
Aluminium oxide
Aluminium nitride
Electrical resistivity
Online Access:http://hdl.handle.net/1822/14782
Country:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/14782

Internet

http://hdl.handle.net/1822/14782

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