Mass spectrometry improvement on an high current ion implanter
The development of accurate mass spectrometry, enabling the identification of all the ions extracted from the ion source in a high current implanter is described. The spectrometry system uses two signals (x-y graphic), one proportional to the magnetic field (x-axes), taken from the high-voltage pote...
| Main Author: | |
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| Other Authors: | , , , |
| Format: | article |
| Language: | eng |
| Published: |
2013
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| Subjects: | |
| Online Access: | http://hdl.handle.net/10400.21/2212 |
| Country: | Portugal |
| Oai: | oai:repositorio.ipl.pt:10400.21/2212 |