X-rays microdetectors based on an array of scintillators: a maskless process using laser ablation

This paper describes a X-rays microdetector based on an array of wells filled with scintillator crystals. A thick-film of aluminum (500 um) is etched by Laser Ablation Technique (LAT) in order to achieve a square well with side of 100 um and 490 um deep vertical sidewalls. The aluminum thick-film wa...

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Detalhes bibliográficos
Autor principal: Rocha, J. G. (author)
Outros Autores: Moreira, M. V. (author), Wolffenbuttel, R. F. (author), Ramos, N. F. (author), Lanceros-Méndez, S. (author), Correia, J. H. (author)
Formato: conferencePaper
Idioma:eng
Publicado em: 2002
Assuntos:
Texto completo:https://hdl.handle.net/1822/4314
País:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/4314