X-rays microdetectors based on an array of scintillators: a maskless process using laser ablation
This paper describes a X-rays microdetector based on an array of wells filled with scintillator crystals. A thick-film of aluminum (500 um) is etched by Laser Ablation Technique (LAT) in order to achieve a square well with side of 100 um and 490 um deep vertical sidewalls. The aluminum thick-film wa...
Main Author: | |
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Other Authors: | , , , , |
Format: | conferencePaper |
Language: | eng |
Published: |
2002
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Subjects: | |
Online Access: | https://hdl.handle.net/1822/4314 |
Country: | Portugal |
Oai: | oai:repositorium.sdum.uminho.pt:1822/4314 |