Piezoelectric resonators based on self-assembled diphenylalanine microtubes
Piezoelectric actuation has been widely used in microelectromechanical devices including resonance-based biosensors, mass detectors, resonators, etc. These were mainly produced by micromachining of Si and deposited inorganic piezoelectrics based on metal oxides or perovskite-type materials which hav...
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Other Authors: | , , , , |
Format: | article |
Language: | eng |
Published: |
2017
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Subjects: | |
Online Access: | http://hdl.handle.net/10773/20207 |
Country: | Portugal |
Oai: | oai:ria.ua.pt:10773/20207 |