APA (7th ed.) Citation

Borges, J. N. P., Martin, N., Barradas, N., Alves, E., Eyidi, D., Beaufort, M. F., . . . Marques, L. (2012). Electrical and optical properties of AlNxOy thin films deposited by reactive DC magnetron sputtering.

Chicago Style (17th ed.) Citation

Borges, Joel Nuno Pinto, et al. Electrical and Optical Properties of AlNxOy Thin Films Deposited by Reactive DC Magnetron Sputtering. 2012.

MLA (8th ed.) Citation

Borges, Joel Nuno Pinto, et al. Electrical and Optical Properties of AlNxOy Thin Films Deposited by Reactive DC Magnetron Sputtering. 2012.

Warning: These citations may not always be 100% accurate.